Introduction to micro-manufacturing:definition, need/importance, applications. Size effect. Classification of micro-manufacturing processes. Micro-machining processes: molecular dynamics at atomistic scale, diamond micro-machining and grinding, ultrasonic micro- machining, micro-EDM, laser beam micro-machining, micro-ECM, electron beam micro- machining, focused ion-beam techniques, abrasive micro-finishing techniques. Micro- forming techniques: laser micro-bending, micro-deep drawing and micro-extrusion. Micro- welding and joining techniques. Micro-fabrication using deposition techniques such as epitaxial, sputtering, chemical vapor deposition (CVD) techniques and Lithography (LIGA) based techniques. Sensors and actuators for micro-manufacturing. Metrology for micro- manufacturing. Introduction to nano-scale manufacturing.
 V.K. Jain, Micromanufacturing Processes, Taylor and Francis, 2012.
 J. McGeough, Micromachining of Engineering Materials, Marcel Dekker,2002.
 K. F. Ehmann, Micromanufacturing: International Assessment of Research and Development, Springer, 2007.
 P. Raichoudhury, Handbook of Microlithography, Micromachining and Microfabrication, 1997.
 V. K. Jain, Introduction to Micromachining, 2nd Ed., Narosa, 2010.
 R. W. Johnstone, Introduction to Surface micromachining, Kluwer Academic, 2004..
 M. Madou, Fundamentals of microfabrication, CRC Press, 1997.
 H. J. Levinson, Principles of lithography, 2nd ed., SPIE Press, 2005.